NASA NTRS · 19820000026
Eliminating Impurity Traps in the Silane Process
Abstract
Redistribution reaction section of silane process progressively separates heavier parts of chlorosilane feedstock until light silane product is available for pyrolysis. Small amount of liquid containing impurities is withdrawn from processing stages in which trapping occurs and passed to earlier processing stage in which impurities tend to be removed via chemical reactions.
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Coleman, L. M.. 1982-12-01. Eliminating Impurity Traps in the Silane Process. https://ntrs.nasa.gov/citations/19820000026
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