NASA NTRS · 19820000112
Oxide Control for Silicon Crystal Growth
Abstract
Web dendrite growth process pulls sheet of newly crystallized silicon from molten silicon. Jets of argon pull outside gas into melt cavity, preventing silicon oxide from passing through heat-shield hold and depositing on it. Generated by aspirators, reversed flow is used in web dendrite process, which produces sheets of single-crystal silicon for low-cost solar cells.
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Wehrli, H. A. I.. 1982-12-01. Oxide Control for Silicon Crystal Growth. https://ntrs.nasa.gov/citations/19820000112
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