NASA NTRS · 19820000274
Efficient Silicon Reactor
Abstract
High-purity silicon efficiently produced and transferred by continuous two-cycle reactor. New reactor operates in relatively-narrow temperature rate and uses large surfaces area to minimize heat expenditure and processing time in producing silicon by hydrogen reduction of trichlorosilane. Two cycles of reactor consists of silicon production and removal.
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Bates, H. E., Hill, D. M., Jewett, D. N.. 1983-05-01. Efficient Silicon Reactor. https://ntrs.nasa.gov/citations/19820000274
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