NASA NTRS ยท 19820007453
Whatever happened to silicon carbide
Abstract
The progress made in silicon carbide semiconductor devices in the 1955 to 1975 time frame is examined and reasons are given for the present lack of interest in the material. Its physical and chemical properties and methods of preparation are discussed. Fabrication techniques and the characteristics of silicon carbide devices are reviewed. It is concluded that a combination of economic factors and the lack of progress in fabrication techniques leaves no viable market for SiC devices in the near future.
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Campbell, R. B.. 1981-01-01. Whatever happened to silicon carbide. https://ntrs.nasa.gov/citations/19820007453
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