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NASA NTRS ยท 19820015778

Some disconnected speculations on slicing silicon

Abstract

The basic principles for qualifying silicon wafering methods are summarized, and unconventional methods of wafering was discussed. Methods of cleaving analogous to diamond cutting, geological processes employing the expansion of freezing water, and karate chops are touched upon.

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BibTeXRIS

Iles, P. A.. 1982-02-01. Some disconnected speculations on slicing silicon. https://ntrs.nasa.gov/citations/19820015778

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