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NASA NTRS ยท 19820018461

Float zone space processing rationale

Abstract

The role of float zone silicon in integrated circuits is surveyed. The problem of oxygen thermal donors and their inhomogeneous distribution is predicted to be a critical issue.

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BibTeXRIS

Jastrzebski, L.. 1981-09-01. Float zone space processing rationale. https://ntrs.nasa.gov/citations/19820018461

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