NASA NTRS · 19820018464
Industry needs for silicon crystals and standards
Abstract
The trend of the device fabrication industry requirement for larger crystals is reviewed. The ranges of properties and uniformities measurement standards needed for resistivity (four-point probe and spreading resistance) and for the chemical composition of oxygen and carbon impurities are presented.
Keep this discovery
Explore connections, maps & timelines
Benson, K. E.. 1981-09-01. Industry needs for silicon crystals and standards. https://ntrs.nasa.gov/citations/19820018464
Cite the original work for its findings. Save a collection to share your selection of sources.