NASA NTRS · 19820060845
Self-heated thermocouples for far-infrared detection
Abstract
A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power of 7 x 10 to the -10th W/sq rt of Hz and a 3-dB frequency response of 150 kHz.
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Neikirk, D. P., Rutledge, D. B.. 1982-09-01. Self-heated thermocouples for far-infrared detection. https://ntrs.nasa.gov/citations/19820060845
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