Silane pyrolysis in a free-space reactor

Abstract

The Union Carbide process for producing silicon for photovoltaic applications proceeds via high purity silane as an intermediate. Decomposition of silane is accomplished in a freespace reactor which utilizes recirculating product hydrogen and silicon to transfer energy from a heated wall to an entering silane jet. Reaction occurs away from the wall, minimizing problems with wall deposition and contamination. A series of long duration and throughput tests has proven the feasibility of this concept. High purity powder can be produced at flows up to 4.5 kg/hr (10 lb/hr) in a 0.2 m (8 inch) diameter reactor with better than 99.99% conversion efficiency. This work is funded by DOE under JPL's Low Cost Solar Array (LSA) program.