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NASA NTRS ยท 19830000333

Improving Trace-Ion Sensitivity

Abstract

Background noise reduced by some special precautions. Blanket of argon flows over solution so no chance for contamination from air to creep in. Conventional pump replaced with one made of polytetrafluoroethlylene component and all metal couplings eliminated from flow lines. Used to improve quality control in integrated circuit fabrication, lens fabrication, and vacuum-tube assembly.

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BibTeXRIS

Buggle, R. N.. 1984-04-01. Improving Trace-Ion Sensitivity. https://ntrs.nasa.gov/citations/19830000333

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