NASA NTRS · 19830000473
Melt-Level Sensing in Silicon-Web Groowth
Abstract
Laser beam reflected from silicon-melt surface onto position detector to monitor melt level during web growth. Silicon web production increased by synchronizing silicon melt replenishment with web growth rate.
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Duncan, C. S., Skutch, M. E., Steinbruegge, K. B.. 1984-04-01. Melt-Level Sensing in Silicon-Web Groowth. https://ntrs.nasa.gov/citations/19830000473
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