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NASA NTRS ยท 19830000555

Improved Hollow Cathode

Abstract

Improved hollow cathode for neutral-beam injector ion sources rapidly started by dielectric breakdown of ignitor plug located at one end of open ended tube. Used in low-current ion implantation, milling, sputtering, and bombardment for surface treatment.

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BibTeXRIS

Aston, G.. 1984-11-01. Improved Hollow Cathode. https://ntrs.nasa.gov/citations/19830000555

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