NASA NTRS · 19830000590
Sampling of Silicon Powder for Impurity Analysis
Abstract
Electron beam forms dense pellets of powdered silicon for Zeeman analysis. Sampling method focuses electron beam on submicron silicon powder. Process enhances quality control in production of low-cost silicon powder for semiconductor industry.
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Yamakawa, K. A., Mccullough, O. R.. 1984-11-01. Sampling of Silicon Powder for Impurity Analysis. https://ntrs.nasa.gov/citations/19830000590
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