NASA NTRS · 19830000692
IC Fabrication Methods Improve Laser Diodes
Abstract
Family of high-performance, tunable diode lasers developed for use as local oscillators in passive laser heterodyne spectrometer. Diodes fabricated using standard IC processes include photolithography, selective etching and vacuum deposition of metals and insulators. Packaging refinements improved thermal-cycling characteristics of diodes and increased room-temperature shelf life.
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Miller, M., Pickhardt, V.. 1984-11-01. IC Fabrication Methods Improve Laser Diodes. https://ntrs.nasa.gov/citations/19830000692
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