NASA NTRS · 19830000708
Processes for VLSI Circuits
Abstract
Four-volume document reviews key technologies for interconnecting in very-large-scale integrated (VLSI) circuits. Document also discusses current and proposed research into novel fabrication techniques for interconnections.
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Wade, T. E.. 1984-12-01. Processes for VLSI Circuits. https://ntrs.nasa.gov/citations/19830000708
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