NASA NTRS · 19840040489
Air-bridge microbolometer for far-infrared detection
Abstract
A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate, a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power 28 pW/sq rt Hz. A thermal model is also presented that accurately fits the response of the detector.
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Neikirk, D. P., Rutledge, D. B.. 1984-01-15. Air-bridge microbolometer for far-infrared detection. https://ntrs.nasa.gov/citations/19840040489
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