Electromagnetic plasma models for microwave plasma cavity reactors

Abstract

A procedure used to design cavity applicators that efficiently produce cylindrical and disk microwave discharges is reviewed. In contrast to most microwave applicators these cavities utilize single mode excitation of the plasma. This method of excitation has the advantage of providing efficient coupling (zero reflected power) to the plasma over a wide range of discharge loading conditions while also allowing, if desired, electric feedback control of the heating process. The design procedure is generalized to any lossy dielectric. Experimental and theoretical research required to further understand microwave discharges is also discussed.