NASA NTRS · 19850000073
Efficient Process for Making Polycrystalline Silicon
Abstract
Solar cells made with lower capital and operating costs. Process based on chemical-vapor deposition (CVD) of dichlorosilane produces high-grade polycrystalline silicon for solar cells. Process has potential as cost-effective replacement for CVD of trichlorosilane.
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Mccormick, J. R., Plahutnik, F. JR., Sawyer, D. H., Arvidson, A. N., Goldfarb, S. M.. 1985-06-01. Efficient Process for Making Polycrystalline Silicon. https://ntrs.nasa.gov/citations/19850000073
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