NASA NTRS · 19850024100
A fluidized-bed reactor for silane pyrolysis
Abstract
The silane decomposition in a fluidized bed reactor was studied. The process feasibility and operating windows were determined. Long duration tests were conducted and silicon purity was demonstrated. A high purity linear was installed in the fluid bed reactor; the FBR product was melted and single crystallized. Product purity improvements are noted.
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Iya, S.. 1984-10-01. A fluidized-bed reactor for silane pyrolysis. https://ntrs.nasa.gov/citations/19850024100
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