NASA NTRS ยท 19850024101
JPL in-house fluidized-bed reactor research
Abstract
Fluidized bed reactor research techniques for fabrication of quartz linears was reviewed. Silane pyrolysis was employed in this fabrication study. Metallic contaminant levels in the silicon particles were below levels detectable by emission spectroscopy.
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Rohatgi, N. K.. 1984-10-01. JPL in-house fluidized-bed reactor research. https://ntrs.nasa.gov/citations/19850024101
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