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NASA NTRS ยท 19850024101

JPL in-house fluidized-bed reactor research

Abstract

Fluidized bed reactor research techniques for fabrication of quartz linears was reviewed. Silane pyrolysis was employed in this fabrication study. Metallic contaminant levels in the silicon particles were below levels detectable by emission spectroscopy.

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BibTeXRIS

Rohatgi, N. K.. 1984-10-01. JPL in-house fluidized-bed reactor research. https://ntrs.nasa.gov/citations/19850024101

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