Recent work on a microwave ion source

Abstract

The performance of a microwave (2.45 GHz) plasma-disk ion source using a cylindrical microwave cavity is described. The operating characteristics in argon and xenon gases with 50-200 W of input power and gas flow rates from 10-80 sccm are presented. In particular, extracted beam current versus accelerating voltage, and specific energy vs. mass utilization efficiency and extracted beam current are presented. Double Langmuir probe measurements indicate that electron densities in excess of 10 to the 12th per cu cm can be readily achieved in the microwave generated plasma.