NASA NTRS · 19860000519
Laser Vacuum Furnace for Zone Refining
Abstract
Laser beam scanned to produce moving melt zone. Experimental laser vacuum furnace scans crystalline wafer with high-power CO2-laser beam to generate precise melt zone with precise control of temperature gradients around zone. Intended for zone refining of silicon or other semiconductors in low gravity, apparatus used in normal gravity.
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Griner, D. B., Zurburg, F. W., Penn, W. M.. 1986-11-01. Laser Vacuum Furnace for Zone Refining. https://ntrs.nasa.gov/citations/19860000519
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