Fluidized-bed development at JPL

Abstract

Silicon deposition on silicon seed particles by silane pyrolysis in a fluidized bed reactor (FBR) was investigated as a low cost, high throughput method to produce high purity polysilicon for solar cell applications. The emphasis of the research is fundamental understanding of fluidized bed silicon deposition. The mechanisms involved were modeled as a six-path process: heterogeneous deposition; homogeneous decomposition; coalescence; coagulation; scavenging; and chemical vapor deposition growth on fines.