NASA NTRS · 19860019894
JPL in-house fluidized bed reactor research
Abstract
The progress in the in-house program on the silane fluidized-bed system is reported. A seed-particle cleaning procedure was developed to obtain material purity near the level required to produce a semiconductor-grade product. The liner-seal design was consistently proven to withstand heating/cooling cycles in all of the experimental runs.
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Rohatgi, N. K.. 1985-06-01. JPL in-house fluidized bed reactor research. https://ntrs.nasa.gov/citations/19860019894
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