NASA NTRS · 19880000446
Forming n/p Junctions With An Excimer Laser
Abstract
Compact equipment yields high-quality solar cells. Computer controls pulses of excimer laser and movement of silcon wafer. Mirrors direct laser beam to wafer. Lenses focus beam to small spot on surface. Process suitable for silicon made by dendritic-web-growth process.
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Alexander, Paul, Jr., Campbell, Robert B., Wong, David C., Bottenberg, William L., Byron, Stanley. 1988-09-01. Forming n/p Junctions With An Excimer Laser. https://ntrs.nasa.gov/citations/19880000446
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