Manipulator For A Vacuum Chamber

Abstract

Rotary seal provides for external actuators. Positioner in vacuum employs four actuators; up/down, horizontal rotary, horizontal, and vertical rotary. External up/down and azimuthal actuators drives shaft entering vacuum chamber through sliding and rotating seal. Placement of actuator motors outside vacuum chamber reduces heat-removal load on system. Atop 2.5-cm-diameter shaft is stage supporting masses as great as 15 kg. Small motors on stage provide horizontal translation and rotation in vertical plane. Manipulator developed for calibrating plasma detectors by subjecting them to particle beams in vacuum. Standard, commercially available parts used.