Surface temperature determination in surface analytic systems by infrared optical pyrometry

Abstract

An IR pyrometric technique for measuring the surface temperatures of metal specimens in an ultrahigh-vacuum analytic chamber is described and demonstrated. The experimental setup comprises a commercial IR microscope with a long-working-distance right-angle objective (focal spot diameter 1 mm at 53 cm), a metal-coated glass vacuum chamber with a Ta-mesh-covered quartz viewport, an Mo specimen stub with an internal heating element, and a Ta disk test specimen with a flat side coated with a high-emissivity graphite film. The results of an initial calibration test are presented graphically and briefly characterized. The measurement error at 450 C is found to be less than 10 C.