NASA NTRS · 19910034958
Silicon-etalon fiber-optic temperature sensor
Abstract
A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.
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Beheim, Glenn, Fritsch, Klaus, Flatico, Joseph M., Tabib Azar, Massood. 1990-01-01. Silicon-etalon fiber-optic temperature sensor. https://ntrs.nasa.gov/citations/19910034958
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