NASA NTRS · 19910064264
Design and analysis of aspherical multilayer imaging X-ray microscope
Abstract
Spherical Schwarzschild microscopes for soft X-ray applications in microscopy and projection lithography employ two concentric spherical mirrors that are configured such that the third-order spherical aberration and coma are zero. Based on incoherent, sine-wave MTF calculations, the object-plane resolution of a magnification-factor-20 microscope is presently analyzed as a function of object height and numerical aperture of the primary for several spherical Schwarzschild, conic, and aspherical two-mirror microscope configurations.
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Shealy, David L., Jiang, WU, Hoover, Richard B.. 1991-08-01. Design and analysis of aspherical multilayer imaging X-ray microscope. https://ntrs.nasa.gov/citations/19910064264
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