Robust, angstrom level circularity profilometry

Abstract

A noncontacting approach is presented which involves measuring the local circumferential curvature of the test piece by simultaneously measuring its circumferential slope at two slightly displaced locations. A pair of sensing beams is scanned along the circumference, and a profile of curvature is built, from which the circularity profile is deduced. The sensing of curvature makes the approach insensitive to all types of vibration and drift and runout errors in the relative rotation. The special qualities of the approach are summarized which make it well suited to measuring cylindrical optics and enable it to accommodate radii as small as twenty millimeters.