Metrology of X-ray optics utilizing shearing interferometric techniques

Abstract

This paper will discuss the optical testing of extreme grazing incidence mirror systems and normal incidence high-precision mirror systems during fabrication processing of the optical substrates. The optical metrology is closely coupled with an advanced material removal process which will be discussed in terms of the optical metrology. Interferometric data will be presented of the optical surfaces. Surface roughness data will be shown and discussed.