Sensor Detects Semiconductor Escaping From Ampoule

Abstract

Sensor detects breakage of ampoule containing molten semiconductor. Chemical reaction between hot semiconductor material and wire causes step increase in electrical resistance and temperature of wire. Because of step increase in resistance, sensor regarded as operating in simple on/off mode used to shut down crystal-growth furnaces automatically. Sensor incorporated into cartridge in various ways; affixed to outer wall of ampoule or to inner wall of cartridge by mechanical mounting or by vapor deposition.