Electrostatically suspended and sensed micro-mechanical rate gyroscope

Abstract

The goal of this work is development of fully electrostatically suspended and rebalancing angular rate sensing micro-gyroscope fabricated according to standard VLSI techniques. Fabrication of test structures is proceeding. Off chip electronics for the electrostatic sensing and driving circuits has been tested. The prototype device will be assembled in a hybrid construction including the FET input stages of the sensors.