Small UHV compatible hyperthermal oxygen atom generator

Abstract

A high purity, hyperthermal, continuous beam atomic oxygen source capable of retrofitting to existing UHV systems has been developed. The instrument complements a general system capability, while its small size and simplicity of design permits tailoring the instrument for most experimental geometries. The flux level presently available is near 1 x 10 (exp 14) cm(exp -2)s(exp -1)(3P) but may be extended toward the theoretical limit of 3x10(exp 15 cm(exp -2)s(exp -1). The energy distribution of the emitted neutrals shows that the mean kinetic energy is about the same as observed for the ions or about 4 eV. The energy of the oxygen atoms may be substantially reduced for other applications by collision with a temperature controlled, non-reactive surface (with a concomitant spread in the energy distribution).