Sorbents Remove Oxygen At High Temperatures

Abstract

Cobalt-exchanged, platinized zeolites 13X and L found conveniently reducible in hot gaseous mixture of hydrogen and nitrogen and thereafter useful as sorbents of trace amounts of oxygen at high temperatures. Aided by catalytic action of platinum, sorbents exhibit rapid oxygen-sorption kinetics and, according to thermodynamic properties of O2/CoO system, capable of lowering level of oxygen in otherwise inert gaseous atmosphere to less than 1 part per trillion in temperature range of 400 to 800 degrees C. Inert atmospheres with these oxygen levels required for processing of certain materials in semiconductor industry.