Improved Solid-State Microanemometer

Abstract

Improved solid-state microanemometer suitable for measuring flows in variety of biomedical, industrial, and other applications. Small size, unique design, and one-piece construction provides combination of short response time, structural rigidity, optimal dissipation of heat, and versatility in application. Device includes four integral sensing resistors exposed to flow measured and serves as hot-film anemometer subunits. Sensing resistors connected to external excitation-and-measurement circuits operating in any of standard hot-film-anemometer modes; constant input voltage, constant input current, or constant resistance with feedback.