Closed-Loop System Removes Contaminants From Inert Gas

Abstract

Concentration of oxygen in this closed-loop system kept low by use of heated catalytic sorbent bed in cartridge. Proposed to keep concentration of water vapor low by use of predried zeolite sorbent bed in another cartridge, and to remove particles smaller than 0.1 micrometer by use of porous metal filters. In specific application, chamber is one in which semiconducting materials processed. By virtue of closed-loop operation, limited supply of inert gas adequate to provide atmosphere for industrial processing of semiconductors.