Advanced Triangulation Displacement Sensors

Abstract

Advanced optoelectronic triangulation displacement sensors undergoing development. Highly miniaturized, more stable, more accurate, and relatively easy to use. Incorporate wideband electronic circuits suitable for real-time monitoring and control of displacements. Measurements expected to be accurate to within nanometers. In principle, sensors mass-produced at relatively low unit cost. Potential applications numerous. Possible industrial application in measuring runout of rotating shaft or other moving part during fabrication in "zero-defect" manufacturing system, in which measured runout automatically corrected.