Surface Micro-Machining: Progress Towards Micro-Electro Mechanical Systems

Abstract

Surface micromachining is a technique for building electromechanical systems in silicon. A number of electromechanical systems have been implemented in miniature using the fundamental structural building blocks of tensile and non-tensile springs, differential capacitance sensing cells, and electrostatic drive. The integration of complicated mechanical structures and electrical circuits onto a single chip is expected to improve reliability and testability of systems. Reduction in interconnect wiring, the increased use of automation, and the inherent reliability of integrated circuits will all contribute to increased reliability of systems.