NASA NTRS · 19970016203
Spatial Resolution and Detectability Limits in Thin-Film X-Ray Microanalysis
Abstract
The major advantages of performing x-ray microanalysis in the analytical electron microscope (AEM) are the high compositional spatial resolution and the elemental analysis sensitivity. Unfortunately, there is usually a trade-off between these two advantages. This paper discusses the factors involved in the optimization of both spatial resolution and sensitivity during x-ray microanalysis and shows the results of such optimization experiments for several AEM instruments.
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Goldstein, J. I., Lyman, C. E., Zhang, Jing. 1990-01-01. Spatial Resolution and Detectability Limits in Thin-Film X-Ray Microanalysis. https://ntrs.nasa.gov/citations/19970016203
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