NASA NTRS · 20000034905
\A Gravity-Related Transport in Reactive Off-Axis Sputtering Deposition
Abstract
An experiment was designed to investigate the transport characterization of reactive off- axis sputtering deposition. Three transport regions were observed when the growth pressures vary from 5 mtorr to 150 mtorr. A new gravity-related phenomenon was revealed in film growth at relatively high growth pressures. This effect is related to the collision process or thermalization of transport species. This study also suggests a design for the substrate holder orientation in the off-axis sputtering system.
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Zhu, Shen, Su, C.-H., Lehozeky, S. L.. 2000-01-01. \A Gravity-Related Transport in Reactive Off-Axis Sputtering Deposition. https://ntrs.nasa.gov/citations/20000034905
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