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NASA NTRS ยท 20010110720

Protective Fullerene (C60) Packaging System for Microelectromechanical Systems Applications

Abstract

The invention involves a method for locating the probe of a scanning tunneling micrograph a predetermined distance from its conducting surface, and specifically the deposition of a monolayer of fullerene C 60 onto the conducting plate. The Fullerene C 60 molecule is approximately spherical and a monolayer of fullerene has a thickness of one nanometer. By providing a monolayer of fullerene on the conducting surface and locating the probe on the surface of the monolayer, a distance of one nanometer can be established between the probe tip and the conducting surface.

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BibTeXRIS

John D Olivas. 2001-08-21. Protective Fullerene (C60) Packaging System for Microelectromechanical Systems Applications. https://ntrs.nasa.gov/citations/20010110720

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