Search NASA⌕ Search
Home/Archive/NASA NTRS

NASA NTRS · 20020043698

Implementation of Self-Align Local Poly Interconnection on 0.25 Micron Flash Memory

C H Lee·C H Lin·H H Chen·Y K Sheu·WenChi Ting·Gary Hong
View original source ↗Export metadata ↓

Abstract

For ETOX Flash technology. the self-aligned source module plays a critical role in minimizing cell size. For advanced Flash technology using the shallow-trench isolation (STI) scheme, however, it is difficult to form a stable source line. The Flash process in this experiment features an ETOX structure and with SIN spacer. Poly-Si (implanted poly) is used as the local interconnection material connecting the source line and was successfully implemented in the ETOX flash array in this paper.

Keep this discovery

BibTeXRIS

C H Lee, C H Lin, H H Chen, Y K Sheu, WenChi Ting, Gary Hong. 2000-11-01. Implementation of Self-Align Local Poly Interconnection on 0.25 Micron Flash Memory. https://ntrs.nasa.gov/citations/20020043698

Cite the original work for its findings. Save a collection to share your selection of sources.

KEEP EXPLORING

Related reports

DOE OSTI2026

Dynamic Interfacial Design in Adaptive Hybrid Materials Enables Reversible and Tunable Mechano-Optic Smart Responses

Next-generation polymeric materials are shifting toward adaptive and interactive behaviors of living systems; however, designing materials that can reversibly modulate optical properties under mechanical deformation while maintaining mechanical robustness remains a key challenge. Here, we report a mechanically robust vitrimer-based adaptive hybrid material (AHM) that exhibits a stretch-induced reversible transparency-to-opacity transition, enabled by the integration of dynamic interactions at the polymer–silica nanoparticle interface and controlled nanoparticle self-assembly. The AHM combines boronic ester–functionalized polystyrene-b-poly(ethylene-co-butylene)-b-polystyrene (S-Bpin) with diol-functionalized silica nanoparticles (diol-SiNPs) to form a hybrid network hosting both dynamic boronic ester and hydrogen-bonding interactions. These reversible linkages facilitate controlled nanoparticle self-assembly and enable strain-induced nanoparticle alignment/aggregation. Upon stretching, SiNP-rich domains align and aggregate within the polymer matrix, while local modulus mismatch between stiff aggregated SiNP/borylated-styrene-rich regions and the softer elastomeric midblock induces surface microwrinkle formation. These internal aggregates and surface wrinkles cooperatively enhance light scattering, producing the opaque state under strain. Furthermore, the tailored AHM exhibits high toughness, thermomechanical stability, reprocessability, and programmable shape-memory behavior. This work presents a dynamic interfacial design strategy for mechanically robust, optically reconfigurable, and reusable soft materials for adaptive optics, smart windows, sensing, soft robotics, and circular smart-material platforms.

adaptive hybrid materials↗
DOE OSTI2026

Advanced-Research-on-Integrated-Energy-Systems-Based Analysis to Support Resilient System Upgrades: Energy to Communities Energyshed In-Depth Partnership with Molokai, Hawaii

The Molokai, Hawaii, Energy to Communities (E2C) Energyshed project represents a collaborative effort between the National Laboratory of the Rockies, Shake Energy Collaborative, the Molokai Clean Energy Hui, Sustainable Molokai, and Ho'ahu Energy Cooperative Molokai to advance Molokai's Community Energy Resilience Action Plan (CERAP). Supported by Hawaiian Electric Company and the Hawaii State Energy Office, the initiative aims to develop a community-defined portfolio of renewable energy solutions that enhance energy resilience while aligning with the Hawaiian Electric Integrated Grid Plan (IGP) and Molokai's energy goals. Phase 1 focused on technical analyses and community engagement to co-design feasible energy scenarios. Challenges such as grid upgrades, storage sizing, and inverter ride-through standards were addressed to align technical and operational requirements with community preferences. The project equips Molokai with actionable data and insights to implement energy initiatives while ensuring resilient and culturally informed solutions. Future efforts aim to finalize project designs, secure interconnection agreements, and deploy energy projects that reflect community priorities and technical feasibility.

24 POWER TRANSMISSION AND DISTRIBUTION↗