Ultra-Precision Optics

Abstract

Under a Joint Sponsored Research Agreement with Goddard Space Flight Center, SEMATECH, Inc., the Silicon Valley Group, Inc. and Tinsley Laboratories, known as SVG-Tinsley, developed an Ultra-Precision Optics Manufacturing System for space and microlithographic applications. Continuing improvements in optics manufacture will be able to meet unique NASA requirements and the production needs of the lithography industry for many years to come.