Gas Flow Controller

Abstract

The Mass Flowmeter is a device used to measure flow of oxygen in spacecraft's life support system. Tylan Corporation's Mass Flow Controller's major application is accurate control of reactive gases-- such as hydrogen, phosphine and silane as they are diffused at extremely high temperatures into silicon wafers. Wafers are ultimately cut up into integrated circuits or "chips" for electronic products. Precise process control afforded by the Mass Flow Controller makes it possible to produce circuit chips of greater performance at lower cost.