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NASA NTRS · 20040088809

Fourier-transform optical microsystems

Collins, S. D.·Smith, R. L.·Gonzalez, C.·Stewart, K. P.·Hagopian, J. G.·Sirota, J. M.
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Abstract

The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.

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NASA Discipline Environmental HealthNon-NASA CenterSpectroscopy, Fourier Transform Infrared/instrumentationMiniaturization/methodsEquipment DesignSupport, Non-U.S. Gov'tHeliumLasersSupport, U.S. Gov't, Non-P.H.SOpticsInterferometryNeon

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Collins, S. D., Smith, R. L., Gonzalez, C., Stewart, K. P., Hagopian, J. G., Sirota, J. M.. 1999-06-15. Fourier-transform optical microsystems. https://ntrs.nasa.gov/citations/20040088809

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