NASA NTRS · 20040110401
Fundamental Insight on Developing Low Dielectric Constant Polyimides
Abstract
Thermally stable, durable, insulative polyimides are in great demand for the fabrication of microelectronic devices. In this investigation dielectric and optical properties have been studied for several series of aromatic polyimides. The effect of polarizability, fluorine content, and free volume on dielectric constant was examined. In general, minimizing polarizability, maximizing free volume and fluorination all lowered dielectric constants in the polyimides studied.
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Simpson, J. O., SaintClair, A. K.. 1997-01-01. Fundamental Insight on Developing Low Dielectric Constant Polyimides. https://ntrs.nasa.gov/citations/20040110401
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