NASA NTRS · 20060009153
Nano-interconnection for microelectronics and polymers with benzo-triazole
Abstract
Benzo-Triazole (BTA) is considered as an important bridging material that can connect an organic polymer to the metal electrode on silicon wafers as a part of the microelectronics fabrication technology. We report a detailed process of surface induced 3-D polymerization of BTA on the Cu electrode material which was measured with the Ultraviolet Photoemission Spectroscopy (UPS), X-ray Photoemission Spectroscopy (XPS), and Scanning Tunneling Microscope (STM). The electric utilization of shield and chain polymerization of BTA on Cu surface is contemplated in this study.
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Park, Yeonjoon, Choi, Sang H., Noh, Hyunpil, Kuk, Young. 2006-01-01. Nano-interconnection for microelectronics and polymers with benzo-triazole. https://ntrs.nasa.gov/citations/20060009153
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