Parameterizable Library Components for SAW Devices

Abstract

To facilitate quick fabrication of Surface Acoustic Wave (SAW) sensors we have found it necessary to develop a library of parameterizable components. This library is the first module in our strategy towards a design tool that is integrated into existing Electronic Design Automation (EDA) tools. This library is similar to the standard cell libraries found in digital design packages. The library cells allow the user to input the design parameters which automatically generate a detailed layout of the SAW component. This paper presents the results of our development of parameterizable cells for an InterDigitated Transducer (IDT), reflector, SAW delay line, and both one and two port resonators.