MEMS for Space Flight Applications

Lawton, R.

NASA NTRS · 20060034764

MEMS for Space Flight Applications

Abstract

Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.

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AFM infrared microscopy IR light emission microscopy LE acoustic microscopy electron microscopy SEM focused ion beam techniques FIB atomic force microscopy Micro-Electrical Mechanical Systems MEMS scanning laser microscopy SLM scanning

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BibTeX RIS

Lawton, R.. 1998-08-04. MEMS for Space Flight Applications. https://ntrs.nasa.gov/citations/20060034764

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